| Title | : | Photomask Fabrication Technology |
|---|---|---|
| Author | : | Benjamin G. Eynon & Banqiu Wu |
| Release | : | 2005-08-11 |
| Kind | : | ebook |
| Genre | : | Engineering, Books, Professional & Technical |
| Size | : | 11705322 |
| Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution. |
